JPS6433764U - - Google Patents
Info
- Publication number
- JPS6433764U JPS6433764U JP1987127337U JP12733787U JPS6433764U JP S6433764 U JPS6433764 U JP S6433764U JP 1987127337 U JP1987127337 U JP 1987127337U JP 12733787 U JP12733787 U JP 12733787U JP S6433764 U JPS6433764 U JP S6433764U
- Authority
- JP
- Japan
- Prior art keywords
- piezoelectric
- piezoelectric actuator
- polymer film
- lead wire
- showing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 229920006254 polymer film Polymers 0.000 claims description 4
- 238000006073 displacement reaction Methods 0.000 claims 2
- 238000012544 monitoring process Methods 0.000 claims 1
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 239000003990 capacitor Substances 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
Landscapes
- Apparatuses For Generation Of Mechanical Vibrations (AREA)
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987127337U JPS6433764U (en]) | 1987-08-21 | 1987-08-21 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987127337U JPS6433764U (en]) | 1987-08-21 | 1987-08-21 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6433764U true JPS6433764U (en]) | 1989-03-02 |
Family
ID=31379678
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987127337U Pending JPS6433764U (en]) | 1987-08-21 | 1987-08-21 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6433764U (en]) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60259347A (ja) * | 1984-06-02 | 1985-12-21 | Canon Inc | 圧電型微動変位素子及びこれを使用した微少位置決め方法 |
-
1987
- 1987-08-21 JP JP1987127337U patent/JPS6433764U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60259347A (ja) * | 1984-06-02 | 1985-12-21 | Canon Inc | 圧電型微動変位素子及びこれを使用した微少位置決め方法 |